Contribution of oxide traps on defect creation and LVSILC conduction in ultra thin gate oxide devices

Author: Zander D.   Saigne F.   Meinertzhagen A.   Petit C.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1489-1493

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Abstract