Direct measurement of residual stress in integrated circuit interconnect features

Author: Horsfall A.B.   dos Santos J.M.M.   Soare S.M.   Wright N.G.   O'Neill A.G.   Bull S.J.   Walton A.J.   Gundlach A.M.   Stevenson J.T.M.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1797-1801

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Abstract