Simulation of time depending void formation in copper, aluminum and tungsten plugged via structures

Author: Dalleau D.   Weide-Zaage K.   Danto Y.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1821-1826

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Abstract