Low-temperature interface modification by hydrocarbon radicals in heteroepitaxy of 3C-SiC on Si clean surface

Author: Hatayama Tomoaki   Tanaka Norihiro   Fuyuki Takashi   Matsunami Hiroyuki  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.26, Iss.3, 1997-03, pp. : 160-164

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Abstract