Author: Wang Fuxue
Publisher: Springer Publishing Company
ISSN: 1543-186X
Source: Journal of Electronic Materials, Vol.39, Iss.10, 2010-10, pp. : 2243-2247
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Ding F.-R. Vantomme A. He W.-H. Zhao Q. Pipeleers B. Jacobs K. Moerman I. Iakoubovskii K. Adriaenssens G.J.
Materials Science in Semiconductor Processing, Vol. 6, Iss. 4, 2003-08 ,pp. :