Piezoelectric properties of sputtered PZT films: influence of structure, micro structure, film thickness (Zr,Ti) ratio and Nb substitution

Author： Remiens D. Cattan E. Soyer C. Haccart T.

Publisher： Elsevier

ISSN： 1369-8001

Source： Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 123-127

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