Control of the Ti diffusion in Pt/Ti bottom electrodes for the fabrication of PZT thin film transducers

Author: Millon C.   Malhaire C.   Dubois C.   Barbier D.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 243-247

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