Structural changes of fluorinated amorphous carbon films by nitrogen incorporation

Author: Valentini L.   Kenny J.M.   Montereali R.M.   Lozzi L.   Santucci S.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 271-277

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Abstract