Techniques for mechanical strain analysis in sub-micrometer structures: TEM/CBED, micro-Raman spectroscopy, X-ray micro-diffraction and modeling

Author: De Wolf I.   Senez V.   Balboni R.   Armigliato A.   Frabboni S.   Cedola A.   Lagomarsino S.  

Publisher: Elsevier

ISSN: 0167-9317

Source: Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 425-435

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