In-situ study of stress evolution during solid state reaction of Pd with Si(001) using synchrotron radiation

Author： Megdiche M. Gergaud P. Curtil C. Thomas O. Chenevier B. Mazuelas A.

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.70, Iss.2, 2003-11, pp. : 436-441

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