Gadolinium scandate by high-pressure sputtering for future generations of high-κ dielectrics

Author： Feijoo P.C.   Pampillón M.A.   Andrés E San   Fierro J.L.G.  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.28, Iss.8, 2013-08, pp. : 85004-85010

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