A new wafer level TSV build-up stacking using oxide bonding

Author: Kim Sun-Rak   Song Jun-Yeob   Lee Seung S.   Jae Hak Lee  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.6, 2013-06, pp. : 65015-65026

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