Author: Ho V. Tay M.S. Moey C.H. Teo L.W. Choi W.K. Chim W.K. Heng C.L. Lei Y.
Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 33-38
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