Electrical properties of Al 2 O 3 gate dielectrics

Author： Lin C.   Kang J.   Han D.   Tian D.   Wang W.   Zhang J.   Liu M.   Liu X.   Han R.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 830-834

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