Author: Petrik P. Khanh N.Q. Horvath Z.E. Zolnai Z. Barsony I. Lohner T. Fried M. Gyulai J. Schmidt C. Schneider C. Ryssel H.
Publisher: Elsevier
ISSN: 1369-8001
Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 141-145
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Abstract