Acoustic lens for capacitive micromachined ultrasonic transducers

Author: Chang Chienliu   Firouzi Kamyar       Nikoozadeh Amin   Yoon Hyo-Seon   Vaithilingam Srikant   Carver Thomas   Khuri-Yakub Butrus T  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.8, 2014-08, pp. : 85007-85019

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