Application of MEMS behavioral simulation to Physics of Failure (PoF) modeling

Author： Schmitt P.   Pressecq F.   Lafontan X.   Duong Q.H.   Pons P.   Nicot J.M.   Oudea C.   Esteve D.   Fourniols J.Y.   Camon H.  

Publisher： Elsevier

ISSN： 0026-2714

Source： Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1957-1962

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