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Temperature dependence of the scanning performance of an electrostatic microscanner

By Ishikawa Noriaki,Ikeda Kentaro,Sawada Renshi in (2016)

IOP Publishing

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Fabrication of circular sawtooth gratings using focused UV lithography

By Mi Wujun,Karlsson Staffan,Holmberg Anders,Danielsson Mats,Nillius Peter in (2016)

IOP Publishing

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Ductile cutting of silicon microstructures with surface inclination measurement and compensation by using a force sensor integrated single point diamond tool

By Chen Yuan-Liu,Cai Yindi,Shimizu Yuki,Ito So,Gao Wei,Ju Bing-Feng in (2016)

IOP Publishing

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PECVD silicon-rich nitride and low stress nitride films mechanical characterization using membrane point load deflection

By Bagolini Alvise,Picciotto Antonino,Crivellari Michele,Conci Paolo,Bellutti Pierluigi in (2016)

IOP Publishing

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A novel sandwich differential capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure

By Xiao D B,Li Q S,Hou Z Q,Wang X H,Chen Z H,Xia D W,Wu X Z in (2016)

IOP Publishing

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MEMS mass spectrometers: the next wave of miniaturization

By Syms Richard R A,Wright Steven in (2016)

IOP Publishing

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Development of a large-area chip network with multidevice integration using a stretchable electroplated copper spring

By Sung Wei-Lun,Chen Chih-Chung,Huang Kevin,Fang Weileun in (2016)

IOP Publishing

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Lipid dip-pen nanolithography on self-assembled monolayers

By Gavutis Martynas,Navikas Vytautas,Rakickas Tomas,Vaitekonis Šarūnas,Valiokas Ramūnas in (2016)

IOP Publishing

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Optical sensitivity non-uniformity analysis and optimization of a tilt optical readout focal plane array

By Fu Jianyu,Shang Haiping,Shi Haitao,Li Zhigang,Ou Yi,Chen Dapeng,Zhang Qingchuan in (2016)

IOP Publishing

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Shadow mask assisted direct growth of ZnO nanowires as a sensing medium for surface acoustic wave devices using a thermal evaporation method

By Parthiban R,Ramakrishnan N,Parthiban R in (2016)

IOP Publishing

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