Charge trapping in SiO2/HfO2/TiN gate stack

Author: Lime F.   Ghibaudo G.   Guillaumot B.  

Publisher: Elsevier

ISSN: 0026-2714

Source: Microelectronics Reliability, Vol.43, Iss.9, 2003-09, pp. : 1445-1448

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